1920×1080元高灵敏行间转移CCD图像传感器（硅基光电探测器器件及组件投稿）

A 1920×1080 Interline Transfer CCD Image Sensor with High Output Sensitivity

摘要:

设计并研制了一款行间转移电荷耦合器件（ITCCD）图像传感器，器件有效阵列规模为1920×1080元，像素尺寸为7.4μm×7.4μm，为实现高电荷转换灵敏度特性，器件采用了1.0μm多晶硅栅长放大器设计，器件电荷转换灵敏度可至22.4μV/e-，饱和电压输出1300mV。为实现纵向抗晕功能，采用了n型埋沟-鞍形p阱-n型衬底结构,器件抗晕能力为200倍，可满足器件在强光下的抗光晕要求。

Abstract:

A interline transfer coupled device (ITCCD) image sensor has been designed and developed. The effective array size of the device is 1920x1080, and the pixel size is 7.4umx7.4um. To achieve high charge conversion sensitivity, the device adopts 1.0 micron gate length amplifier which allows for a charge conversion sensitivity of 22.4uV/e and a saturation voltage output of 1300mV. In order to realize the vertical anti-blooming function, an n-type buried channel saddle p-well-n-type substrate structure is adopted. The vertical anti-blooming ability is 200X, which can meet the antibllooming requirements of the device under strong light.