基于涡旋光相移干涉的高精度微测量技术研究（新型光电探测会议推荐稿件）

High-precision non-contact micro-measurement technique based on vortex light

摘要:

为实现精密加工和芯片制造行业中物体微位移的高精度测量,提出了一种基于涡旋光干涉的高精度微位移测量技术。通过改进传统的马赫-曾德干涉系统,采用空间光调制器(SLM)生成涡旋光作为参考光源,与作用于被测物体的球面波物光发生干涉,产生螺旋形的干涉条纹。物体的微小位移引起干涉条纹旋转,通过测量旋转角度即可确定位移量。该技术结合激光干涉优点,经过图像处理、四步相移法和解包裹算法,生成解包裹相位图和位移分布图,从而精确分析物体的微位移量。实验结果表明,该方法测量误差低于3%,重复性测量平均误差为1.4%。该系统操作简便,测试精度高,且稳定可靠。

Abstract:

In order to realize high-precision micro-displacement measurement of objects, this paper proposes a high-precision micro-displacement measurement technique based on vortex light interference. By improving the traditional Mach-Zehnder interferometric system, a spatial light modulator (SLM) is used to generate vortex light as a reference light source, which interferes with the spherical object light acting on the object to be measured and produces spiral interference fringes. Small displacements of the object cause the interference fringes to rotate, and the amount of displacement can be determined by measuring the angle of rotation. This technique combines the advantages of laser interference with image processing, a four-step phase-shifting method and a unwrapping algorithm to generate unwrapped phase maps and displacement distribution maps, so as to accurately analyze the amount of micro-displacement of the object. Experimental results show that the measurement error of this method is less than 3%, and the average error of repeatability measurement is 1.4%. The system is not only easy to operate, with high testing accuracy, but also stable and reliable, which is suitable for industries such as precision machining and chip manufacturing, providing an effective solution for high-precision displacement measurement.