集成超表面的MEMS热电堆红外探测器的设计及仿真

Design And Simulation Of A MEMS Thermopile Infrared Detector With Integrated Metasurface

摘要:

MEMS热电堆红外探测器作为一种重要的红外探测技术，已经众多领域得到了广泛应用。随着红外技术的不断发展和应用需求的不断增加，热电堆红外探测器的性能指标也提出了更高的要求。设计了一种在吸收区集成超表面结构的热电堆结构，使其对9~11μm的红外光吸收率增大到了70%左右，同时，将热偶条形状设计为热端窄，冷端宽的四边形结构，可使热端向温度集中区进一步延伸，并有效降低了内阻。采用有限元仿真软件对结构进行仿真，结果表明，集成超表面后的探测器响应电压可达到37.876mv，响应率和探测率经计算后分别为41.9V/W，1.97×108cm·Hz1/2·W-1，性能分别提升了38.9%、38.7%和39.7%。

Abstract:

As an important infrared detection technology, MEMS thermopile infrared detectors have been widely used in many fields. With the continuous development of infrared technology and the increasing application demands, the performance index of thermopile infrared detectors has also put forward higher requirements. A thermopile structure with an integrated super-surface structure in the absorption region is designed to increase the absorption rate of infrared light from 9 to 11 μm to about 70%, and at the same time, the shape of the thermocouple strip is designed as a quadrilateral structure with a narrow hot end and a wide cold end, which can make the hot end extend further to the temperature concentration region and effectively reduce the internal resistance. The finite element simulation software is used to simulate the structure, and the results show that the response voltage of the detector after integrating the super-surface can reach 37.876 mv, and the response rate and detection rate are calculated to be 41.9 V/W and 1.97 × 108 cm-Hz1/2-W-1, with the performance enhanced by 38.9%, 38.7% and 39.7%.