玻璃在射频系统封装和射频元件中的应用研究进展
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中国电子科技集团公司第十研究所

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TN20;TN61

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Research progress on the application of glass in RF system packaging and RF components
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    摘要:

    未来无线通信系统将部署更高频段以满足其高性能、微型化、多样化等发展需求。射频技术是实现无线通信系统的基础,直接决定整个通信系统的性能。玻璃具有优异的高频电学性能、高稳定性等优点,并且玻璃表面高密度细金属导线成型技术和高可靠大高宽比通孔加工技术日趋成熟,因此正逐渐广泛应用于射频系统先进封装和无源射频元件的衬底材料。本文系统概述了玻璃在芯片后装、芯片埋置、三维堆叠这三种射频封装技术和传输线、互联线、滤波器、移相器、天线这五种无源射频元件中的最新研究进展,从结构集成度、工艺实现性、射频性能等角度剖析了不同先进封装结构和无源射频元件,并分析了各自所面临的挑战。最后,从光电共封装、SOP集成、高效散热等方面探讨了玻璃基射频系统的未来发展方向。

    Abstract:

    Wireless communication systems will deploy higher frequency bands to meet their development needs, such as high performance, miniaturization, and diversification, in the future. Radio frequency (RF) technology is the foundation for implementing wireless communication systems and directly determines the performance of the entire communication system. Glass has excellent high-frequency electrical performance, high stability and other advantages, and the surface high-density forming technology for fine metal wire and high-reliability processing technology for large aspect ratio through hole are becoming increasingly mature. Therefore, it is gradually being widely used as a substrate material for advanced packaging of RF systems and passive RF components. This article provides a systematic overview of the latest research progress on glass in three RF packaging technologies: chip back loading, chip embedding, and 3D stacking, as well as five passive RF components: transmission lines, interconnect lines, filters, phase shifters, and antennas. Different advanced packaging structures and passive RF components are analyzed from the perspectives of structural integration, process feasibility, and RF performance, and the corresponding challenges are also analyzed. Finally, the future development direction of glass-based RF systems was discussed from the aspects of optoelectronic co-packaging, SOP integration, and efficient heat dissipation.

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  • 收稿日期:2024-05-20
  • 最后修改日期:2024-05-20
  • 录用日期:2024-06-24
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