石英微透镜的制备及其测试技术研究

Study on Fabrication and Characterization of Quartz Microlens Array

摘要:

提出一种利用光刻胶热熔和等离子体刻蚀技术相结合的石英微透镜阵列的制备工艺。详细研究了热熔和感应耦合等离子体刻蚀等关键工艺,并确定了最佳工艺参数。最终在石英衬底上制备了不同尺寸和形状的微透镜阵列。微透镜的几何形貌和光学性能测试结果表明,所制备的石英微透镜阵列具有很好的尺寸一致性,并且表面质量高,测试焦距与理论计算值相吻合。该方法制备的石英微透镜阵列具有良好的成像性能,可广泛应用于光学领域。

Abstract:

This study presents the fabrication process of quartz microlens arrays (MLAs) using a combination of photoresist thermal reflow and plasma etching techniques. Key fabrication steps, including thermal reflow and inductively coupled plasma reactive ion etching (ICP-RIE), were investigated in detail. The optimal process parameters were determined, enabling the preparation of quartz MLAs in various sizes and shapes. The geometrical morphology and optical properties of the fabricated MLAs were evaluated, showing high uniformity and excellent surface quality. The measured focal lengths were found to be in close agreement with theoretical predictions. The results demonstrate that the fabricated MLAs exhibit excellent imaging performance, making them highly suitable for various optical applications.