石英微透镜的制备及其测试技术研究

Study on Fabrication and Measurement of Quartz Microlens Array

摘要:

本文介绍了利用光刻胶热熔工艺和等离子体刻蚀工艺相结合的方法制作石英微透镜的工艺技术。实验中,对微透镜制作过程中的热熔工艺、刻蚀工艺进行了深入的研究,确定了最佳工艺参数,并在石英衬底上制备了不同尺寸和形状微透镜阵列。微透镜的几何形貌和光学性能测试结果表明,制备的石英微透镜阵列具有很好的尺寸一致性、表面质量高,测试焦距与理论计算值相吻合。该方法制备的石英微透镜阵列具有良好的成像性能,可广泛应用于光学领域。

Abstract:

Fabrication process of quartz microlens arrays(MLAs)based on photoresist thermal reflow and plasma etch method was introduced. The main process of MLAs fabrication, such as reflow and inductive coupled plasma reactive ion etching (ICP-RIE), were studied. Finally, the optimal process parameters were determined, and quartz MLAs with different sizes and shapes were prepared. The results of geometrical morphology and optical properties showed that the fabricated quartz MLAs had good consistency and high surface quality, and the measured focal length was in good agreement with the theoretical calculation. It turned out that the fabricated MLAs had good imaging performance and could be widely used in the field of optics.