基于光刻胶修正技术的石英锥形侧壁刻蚀工艺研究

Research on the tapered sidewall etching of quartz based on photoresist modification technology

摘要:

基于光刻胶修正技术,采用两步刻蚀法对石英锥形侧壁的刻蚀工艺进行研究。首先利用Ar、O2、CF4气体对光刻胶刻蚀,将光刻胶的垂直侧壁修改为锥形侧壁。然后以此为掩膜实现光刻胶倾斜侧壁向石英材料的转移。两步刻蚀在同一个刻蚀腔室内完成。详细研究了光刻胶修正工艺中刻蚀气体流量、刻蚀功率、温度以及刻蚀时间等工艺参数对刻蚀速率、选择比以及刻蚀形貌的影响。通过综合优化工艺制备出刻蚀面光滑、倾斜角度为60°的石英刻蚀形貌。该工作为氧化硅以及其他材料的倾斜侧壁刻蚀工作提供了有力的参考。

Abstract:

Quartz tapered sidewall etching with two-step etching method has been studied based on photoresist modification technology. Firstly, the vertical sidewall of the photoresist was modified to a tapered profile using Ar/O2/CF4 plasma. Then the transfer of the tapered sidewall of the photoresist to quartz is carried out in the same etching chamber. The influence of gas flow, etching power, temperature and etching time on the etching rate, selectivity and morphology in the photoresist modification process was studied in detail. Through optimizing the process parameters, tapered quartz profile with a sidewall angle of 60°and a smooth surface was prepared. This work provides a helpful guideline for tapered sidewall etching of SiO2 as well as other materials.