用于FBG解调的AWG芯片的设计、仿真与制备

Design, Simulation and Fabrication of AWG Chip for FBG Demodulation

摘要:

设计、仿真并制备了一种用于光纤布拉格光栅(FBG)解调的阵列波导光栅(AWG)芯片。该芯片基于SOI衬底进行制备,并在AWG的输入/输出波导、阵列波导与平板波导之间采用双刻蚀结构进行优化。经仿真,该AWG的插入损耗为1.5dB,串扰小于 -20dB,3dB带宽为1.5nm。优化后的AWG芯片采用深紫外光刻技术、电感耦合等离子体等技术制备。经测试,该AWG的插入损耗为3dB,串扰小于 -20dB,3dB带宽为2.3nm。搭建了基于该AWG的解调系统,解调实验结果表明,该系统在0.8nm范围内的解调精度可达11.26pm,波长分辨率为6pm。

Abstract:

The miniaturized fiber Bragg grating (FBG) demodulation system is a hot research topic in the field of fiber optics sensing. The development of photonic integration technology has given rise to a series of compact FBG demodulation devices. Arrayed waveguide gratings (AWGs) serve as the core components in photonic integrated demodulation systems. Their spectral characteristics have a significant impact on the demodulation performance of photonic integrated FBG demodulation systems. In this study, we designed, simulated, and fabricated an arrayed waveguide grating (AWG) based on a silicon on insulator (SOI) substrate. Test results indicate that this AWG has an on-chip insertion loss of 3dB, crosstalk of less than -20dB, and a 3dB bandwidth of 2.3nm. We constructed a demodulation system based on this AWG, and experimental results show that the system achieves a demodulation accuracy of 34.2pm within a 0.8nm range, with a wavelength resolution of 6pm.