具有温度补偿的微细圆柱基MEMS流速传感器研究

Research on Micro-cylindrical Based MEMS Flow Rate Sensor with Temperature Compensation

摘要:

目前常见的流速传感器由于尺寸原因,只能介入管径较大的管道进行液体流速测量。设计并制造了一种可介入小管径管道的、具有温度补偿功能的圆柱基流速传感器,器件采用旋转投影曝光和微机电系统(MEMS)技术制作而成,包含一个薄膜型加热电阻和一个稳定补偿电阻,基于热阻原理可实现对不同温度流体流速的精确测量。测试结果表明:该流速传感器的温度系数为0.2236%/℃,灵敏度为4.25mV/(cm·s-1)。研制的圆柱基MEMS流速传感器可在内径为2mm的管道中对具有一定温度变化的流体进行流速测量,有望应用于工业、生物医学等领域。

Abstract:

Due to size reasons, current common flow rate sensors can only be inserted into pipes with larger diameters to measure liquid flow rate. To be placed into a micro pipeline, a cylindrical thermal-resistance micro-electromechanical system (MEMS) flow sensor with temperature compensation was designed and fabricated. It is composed of a heating resistor and a temperature-measuring resistor to measure the flow rate through the working principle of heat loss. The experimental results show that the temperature coefficient of resistance (TCR) is 0.2236%/℃ and the sensitivity was 4.25mV/(cm·s-1). The designed circuits demonstrate an excellent effect of temperature compensation for accurate measuring results. The proposed flow sensor can measure the flow rate in a pipe with an inner diameter of 2mm, and is expected to be applied to the industrial, biomedical and other fields.