InP基连续面型方形微透镜设计与制作技术研究

Research on the Design and Manufacturing Technologyof InP Based Continuous Square Microlens

摘要:

本文建立了非球面连续面型方形口径微透镜性能仿真模型,利用ZEMAX软件对10°视场、50um周期、填充因子接近100%的磷化铟微透镜面型参数进行了优化设计。开发了衍射调制动态曝光与感应耦合等离子体刻蚀系统误差补偿方法制作出的磷化铟微透镜表面粗糙度小于2nm,面型数据与设计值相比误差小于1/4工作波长,达到完善成像水平。

Abstract:

In this paper,the performance simulation model of aspheric continuous surface square aperture microlens was established, and the surface parameters of InP microlens with 10°field of view,50μm period and fill factor close to 100% were optimized by ZEMAX software. A diffraction-modulated dynamic exposure and inductively coupled plasma etching system error compensation method was developed to produce InP microlens with a surface roughness of less than 2nm, and the surface shape data has an error of less than 1/4 of the working wavelength compared to the design value, achieving a complete imaging level.