基于片上微腔自反馈注入锁定的窄线宽激光器

Self-Feedback-Injection Locked Narrow-Linewidth Laser Based on On-Chip Microcavity

摘要:

本文对半导体激光器外腔自反馈注入锁定进行了理论分析,研究了片上微腔的自反馈注入锁定对于DFB激光器输出线宽的影响,分析了决定锁定带宽及线宽压缩系数的关键参数。基于Q值为2.4×106^的片上Si3N4微腔的后向瑞利散射实现了DFB激光器的自反馈注入锁定,将其输出线宽由自由运转时的556.71kHz压窄到了92.28kHz,锁定带宽达到425 MHz。研究结果有助于理解半导体激光器自反馈注入锁定机理,并为实现窄线宽激光器提供了新的结构更简单、集成化潜力更高的方案。

Abstract:

Theoretical analysis of the self-feedback injection locking of the external cavity of the semiconductor laser is carried out. The influence of the self-feedback injection locking of the on-chip microcavity on the output linewidth of the DFB (distributed feedback) laser is studied, and the key parameters determining the locking bandwidth and the linewidth compression factor are analyzed. Based on the back Rayleigh scattering of the on-chip Si3N4 microcavity with a Q value of 2.4×106, the self-feedback injection locking of the DFB laser is realized. The line width is narrowed from 556.71 kHz during free-running to 92.28 kHz, and the locking bandwidth reaches 425MHz. The research results provide a new solution with simpler structure and higher integration potential for the realization of narrow linewidth lasers.xxxxx (摘要内容：五号Times New Roman)