中国科学院微电子研究所
国家科技部重点研发计划(批准号:2018YFB1500203-04/2018YFB1500204-01、2022YFF0709501);国家自然科学基金(批准号:12035020, 52072399, 62074165, 12175305, 62104253和12105357) 和北京市自然基金(批准号:4192064, 1212015)
中国科学院微电子研究所
This work was supported by the National Key Research and Development Program of China (Grant No. 2018YFB1500203-04/2018YFB1500204-01、2022YFF0709501). National Natural Science Foundation of China (Grant Nos. 12035020, 52072399, 62074165, 12175305, 62104253和12105357), and the Natural Science Foundation of Beijing Municipality (Grant Nos. 4192064,1212015).