金刚石复合热沉面发射激光器面阵热特性研究

Thermal Study of Vertical-cavity Surface-emitting Laser Based on Diamond Heat Sink

摘要:

通过设计基于金刚石微槽结构的复合热沉,利用不同材料的热导率差异改变热流传导方向,以优化垂直腔面发射半导体激光器(VCSEL)面阵由于温度分布不均匀导致的中心热量堆积的问题,从而改善激光器面阵整体的输出功率,提高可靠性。基于有限元分析法建立三维热电耦合模型,研究了VCSEL面阵单元排布方式对激光器热串扰效应的影响,同时还研究分析了金刚石复合热沉中微槽形状和位置的变化对半导体激光器内部温度的影响,设计最优结构对激光器的出光性能做进一步优化。采用金刚石复合热沉后的垂直腔面发射激光器面阵,与传统金刚石热沉的封装结构相比,激光器发光单元的温度差值降低了29%,为大面积半导体激光器面阵的输出功率优化提供了新思路。

Abstract:

By designing a composite heat sink based on diamond micro-groove structure, the utilization of thermal conductivity difference changes the heat flux conduction, to optimize the problem of heat accumulation in the center of the VCSEL surface array due to uneven temperature distribution, thus improve the overall output power and reliability of the laser surface array. Based on the finite element analysis, a three-dimensional thermoelectric coupling model was established to study the effect of vertical-cavity surface-emitting laser surface array unit arrangement on the thermal crosstalk effect of the laser. Moreover, the effect of the change of microgroove shape and position in the diamond composite heat sink on the internal temperature of the semiconductor laser was also studied and analyzed. And the optimal structure was designed for further optimization of the laser output performance. The vertical-cavity surface-emitting laser facet array with diamond composite heat sink reduces the temperature difference of the laser emitting unit by 29% compared with the conventional diamond heat sink package structure. This provides a new idea for output power optimization of large-area semiconductor laser facet arrays.