光学元件磁流变加工驻留时间粒子群优化算法

Particle Swarm Optimization Algorithm for Dwell Time of Optical Element in Magnetorheological Finishing

摘要:

为实现光学元件磁流变高精度加工,基于脉冲迭代原理,提出基于粒子群算法的驻留时间优化方法。该方法在脉冲迭代法的基础上引入粒子群算法对整体面型残差进行优化,通过对整体驻留时间的判定,从而实现每个驻留时间点的最优选择,达到高精度面形加工。通过对Φ156mm光学表面仿真加工,均方根(RMS)值和峰谷(PV)值从初始的169.164nm和1161.69nm收敛到23.4925nm和807.2156nm。仿真结果表明,该算法能在保证面形收敛精度的同时快速获得稳定可靠的驻留时间分布,能有效降低中频误差,其算法性能优于常用的脉冲迭代法。该算法为磁流变抛光光学元件加工过程中的驻留时间计算提供了一种解决方案。

Abstract:

A dwell time optimization method on particle swarm optimization algorithm was proposed for the high-precision magnetorheological machining of optical components, based on pulse iteration principle. This method introduced the particle swarm optimization algorithm to optimize the residual error of the overall surface on the basis of the pulse iteration method. Through the determination of the overall dwell time, the optimal selection of each dwell time point was realized and the high-precision surface machining was achieved. The root mean square (RMS) and peak valley (PV) values of Φ156mm optical surface simulation converged from the initial 169.164nm and 1161.69nm to 23.4925nm and 807.2156nm. The simulated results showed that the proposed algorithm not only ensured theaccuracy of surface convergence, but also obtained stable and reliable dwell time distribution. The proposed algorithm is better than the common pulse iteration method, effectively reducing the mid-spatial error. This algorithm provides a solution for the dwell time calculation in the process of magnetorheological finishing optical components.