1024×1024元帧转移纵向抗晕CCD图像传感器

1M Frame Transfer CCD Image Sensor with Vertical Antiblooming

摘要:

帧转移电荷耦合器件(FTCCD)主要应用于可见光信号探测,其在强光应用场合容易出现光晕现象。针对该问题,研制了帧转移纵向抗晕CCD图像传感器,该器件阵列规模为1024×1024元,像素尺寸为12μm×12μm。为了实现纵向抗晕功能,采用了n型埋沟-鞍形p阱-n型衬底结构,纵向抗晕倍数为200倍,器件满阱电子数为大于等于200ke-,读出噪声小于等于80e-,动态范围大于等于2000∶1。

Abstract:

Frame transfer charge coupled device (FTCCD) is mainly used for visible light detection, which is prone to bloom in strong light applications. To solve this problem, a frame transfer vertical anti-blooming CCD image sensor was developed. The array size of the device was 1024×1024 elements, and the pixel size was 12μm×12μm. In order to realize the vertical anti-blooming function, an n-type buried channel saddle p-well-n-type substrate structure was adopted. The vertical anti-blooming multiple is 200X, the full capacity is no less than 200ke-, the readout noise is no more than 80e-, and the dynamic range is no less than 2000∶1.