可集成制造的平面型电磁直线作动器研究

Study of planar electromagnetic linear actuators with integrated manufacturing

摘要:

电磁作动器由于具有输出力大、行程长、无接触等优势，在通讯、自动测试、电力电子等领域有广泛的应用前景，但由于受限于体积大、制造工艺复杂，难以满足相关领域电子系统向微型化、集成化的发展需求。针对上述问题，本文应用平面型集成线圈及高深宽比微结构设计、制造了微型化电磁作动器的原型样机，初步测试结果表明，器件的输出力可达mN量级、输出位移大于50um、响应时间小于10ms，为进一步开展相关器件研究探明了可行的技术路径。

Abstract:

The electromagnetic actuator has a wide application prospect in communication, automatic testing, and power electronics due to its high output force, long stroke, and no contact, but it is difficult to meet the development demand of miniaturization and integration of electronic systems in related fields due to its large size and complicated manufacturing process. To address the above problems, this paper designs and manufactures a prototype of miniaturized electromagnetic actuator by applying planar integrated coils and high aspect ratio microstructure. Preliminary test results show that the output force of the device can reach the mN level, the output displacement is greater than 50um, and the response time is less than 10ms, which indicates a feasible technical path for further research on the device.