MOEMS气体传感技术的研究进展

Advances in the Research on MOEMS Gas Sensing Technology

摘要:

MOEMS气体传感技术是光学式气体传感器技术与MOEMS技术和新材料的创新型技术方案。MOEMS气体传感器具有更低的价格、更高的集成度、更强的抗干扰能力、更高的测试精度。本文首先介绍主要的光学气体传感系统的结构及其工作原理，随后介绍了MOEMS气体传感技术中最新的微光学器件及微光学学系统。通过对MOEMS气体传感器的主要成果和最新研究进展的综述， 对未来MOEMS气体传感器的研究重点和研究挑战等进行展望。

Abstract:

MOEMS gas sensing technology is an innovative technological solution for optical gas sen-sing techniques combined with MOEMS technology and new materials.MOEMS gas sensor has many adv-antages such as lower cost, higher integration, stronger anti-interference, higher test accuracy and so on. This paper firstly introduced the structure and working principle of primary optical gas sensing systems.Su-bsequently, the latest microoptical devices and microoptical system achievements in MOEMS gas sensing technology are introduced.Take the current research status of the MOEMS gas sensing devices as clue, ch-allenges and priorities of MOEMS gas sensor are discussed.