基于衍射色散原理的光谱共焦位移测量技术综述

Review of Chromatic confocal displacement measurement techniques based on the diffractive dispersion

摘要:

精密制造业发展迅猛,对精密测量技术的要求日趋提升。位移检测技术则是几何量精密测量的基础,在当代精密机械制造领域应用广泛。光谱共焦位移测量系统具有对环境光、被测物倾斜、材料类型不敏感、测量速度快以及测量分辨率高等优点,在精密位移测量领域占据重要地位。光谱共焦位移测量系统包括共焦光学系统、光谱探测系统、光谱数据处理系统三个部分。近年国内外研究人员广泛的研究了使用衍射光学元件的光谱共焦位移测量系统。本文主要针对共焦光学系统部分衍射光学元件的应用进行综述。首先介绍了光谱共焦位移测量原理及基于衍射色散原理的光谱共焦位移测量技术; 其次,阐述了基于衍射色散原理的光谱共焦位移测量的关键技术发展现状,最后展望了该技术的发展趋势。

Abstract:

With the rapid development of precision manufacturing industry, the demand for precision measurement technology is increasing fast. Displacement detection technology is the basis of geometric precision measurement and is widely used in the field of contemporary precision machinery manufacturing. The chromatic confocal displacement measurement system has the advantages of insensitivity to ambient light, tilt of the measured object, materials, high measure speed and high resolution. So it plays an significant role in the field of precision displacement measurement. The chromatic confocal displacement measurement system includes confocal optical system, spectral detection system and spectral data processing system. In recent years, researchers have widely studied the spectral confocal displacement measurement system using diffractive optical elements. This paper mainly summarizes the structure optimization of confocal optical system by diffractive optical elements. We Firstly introduced the principle of chromatic confocal displacement measurement and the principle of spectral confocal displacement measurement based on diffraction dispersion principle. Then, the development status of key technologies of chromatic confocal displacement measurement based on diffractive dispersion principle is summarized. The development trend of this technology is prospected in the end of this paper.