Al/N共掺杂TiO2薄膜的制备及光学性能

Preparation and Optical Properties of Aluminum and Nitrogen Co-doped TiO2 thin Film

摘要:

为了进一步开发TiO2在太阳电池和降解有机化合物中的应用，改善其各方面光学性能，本实验采用溶胶-凝胶旋涂法（Sol-gel spin-coating method）分别制备了Al掺杂量为3.00 at%，N掺杂量为6.00 at%、7.00 at%、8.00 at%、9.00 at%的Al-N共掺杂TiO2薄膜样品。对样品测试的结果表明，共掺杂样品依旧保留了TiO2的基本结构，并且Al/N共掺杂样品的晶粒尺寸有不同程度的减小，使样品表面得以修饰，变得更加均匀、平整。共掺杂样品吸收边都出现了不同程度的红移，在紫外光区以及可见光区的吸光性都有所增强。N掺杂量为7.00 at%时，（101）衍射峰值最大，峰型最尖锐，所得到的TiO2薄膜的光学性能最好。共掺杂后的样品与本征TiO2相比带隙值都有所减小，且最小值为2.873 eV。以上结果表明Al/N共掺杂TiO2薄膜使其光学性能实现改善。

Abstract:

In order to further develop the application of TiO2 in solar cells and degradation of organic compounds, improve its optical properties in all aspects. In this study, based on the sol-gel spin coating method, aluminum and nitrogen co-doped TiO2 film samples with aluminum doping amount of 3.00at%, nitrogen doping amount of 6.00 at%, 7.00 at%, 8.00 at%, 9.00 at% were prepared. The test results of the samples show that the basic structure of TiO2 is still retained in the co-doped samples, and the grain size of aluminum and nitrogen co-doped samples is reduced to different degrees, which makes the surface of the samples modified to become more uniform and flat compared with the undoped. The co-doped samples showed different degrees of red shift and enhanced absorbance in both UV and visible regions. When the doping amount of nitrogen is 7.00at%, the diffraction peak of (101) is the largest and the peak type is the sharpiest, and the obtained TiO2 film has the best optical performance. Compared with the eigenstate TiO2, the band gap values of the co-doped samples are decreased, and the minimum value is 2.873 eV. The above results indicate that Al/N co-doped TiO2 films can improve their optical properties.