波浪式 MEMS 谐振陀螺的设计与研究

Design and Research of a Novel Wavy-like MEMS Resonator Gyroscope

摘要:

本文提出并研制了一种具有高机械灵敏度和低零偏稳定性的新型波浪式MEMS谐振陀螺(WDRG)。该结构的设计方法是将传统的环式MEMS谐振陀螺(DRG)转变为波浪式环，以提供更高的热弹性品质因数。此外，与传统DRG相比，WDRG具有更高的制造误差抗扰度。通过优化结构参数，进一步提高了WDRG的性能。通过有限元法(FEM)给出了主要结构参数对WDRG性能的影响。优化后WDRG的热弹性品质因数、机械灵敏度和偏置稳定性分别为450k、1.05μm/(°/s)和0.076°/h。与传统DRG相比，零偏稳定性显著降低90%，热弹性品质因数和机械灵敏度分别显著提高215%和950%。

Abstract:

In this paper, a novel wave-like disk resonator gyroscope (WDRG) with high mechanical sensitivity and low bias stability has been proposed and developed. The structure is designed by turning the traditional disk resonator gyroscope (DRG) rings into wavy rings, which has the potential to provide a higher thermo-elastic quality factor. In addition, the WDRG has higher fabrication error immunity compared with the traditional DRG. The performance of WDRG is further improved by optimizing the structural parameters. The influence of the main structural parameters on the WDRG’s critical performances is given through finite element method (FEM). The new prototype's optimized thermal- elastic quality factor, mechanical sensitivity, and bias stability are 450k, 1.05 μm/(°/s), and 0.076 °/h, respectively. Compared with traditional DRG, the bias stability is significantly decreased by 90%, and the thermal- elastic quality factor and mechanical sensitivity are considerably improved by 215% and 950%, respectively.