基于InP 4×4 MMI的90°光混频器设计与仿真制作

The design and fabrication of 90° optical 90° - hybrid based on InP 4×4 MMI

摘要:

本文设计并制作了一种InP基4×4基于InP 4×4 MMI的90°光混频器,并系统地介绍InP基4×4 MMI的该光混频器的芯片结构及工作原理,。光混频器芯片的波导层为InGaAsP材料,包层和衬底为InP材料,单模波导的宽度设计为2.6 μm,多模干涉波导(MMI)的长度和宽度分别设计为844 μm、20 μm。本工作采用三维光束传播法(3D BPM),分析了折射率、芯层厚度、波导宽度和波导长度的误差容限,仿真结果表明,在在1535～1565 nm波长范围内,所设计的光混频器芯片的净插入损耗小于1 dB,相位偏差小于±5°。所设计的该光混频器芯片在实验室制作,并在耦合测试平台上进行测试。,测试结果表明,在1535～1565 nm波长范围内,光混频器芯片的相位偏差小于±5°,与仿真结果一致。

Abstract:

This researche designed and constructfabricatedion of a 90° kind of based on InP - 4 x4-90 ° of MMI opticalmixer hybrid based on an InP 4×4 MMI, systematically introducinges the InP base 4×4 - mixer chip structure and operatingworking principle of the chipMMI light., The optical hybrid was fabricated with the light of mixer chip InGaAsP waveguide layer material, InP cladding layer and InP InP substrate material., Tthe width of the single mode waveguide was designset to be 2.6 μm, and multimode interference waveguide ( MMI) the length and width of multimode interference waveguide (MMI) the design forwere set to be 844 μm and, 20 μm , respectively. Using theThis work used three dimensional beam propagation method (3Dd- BPM) to , I analyzed the error tolerance of the refractive index, core layer thickness, the width and the waveguide length of waveguide error tolerance,. It was found that in the 1535nm ~ 1565 nm wavelength range , optical hybrid’sthe light of the design of mixer chip insertion loss is less than 1 db and phase deviation is less than 5° in the wavelength range of 1535 ~ 1565 nm, phase deviation is less than 5 °. The optical hybrid was design of light mixer chip fabricatedmade in laboratory, and tested on the coupling test platform to test,. The test results shows that phase deviation is less than 5° in the wavelength range of 1535 ~ 1565 nm, which is consistent with the simulation resultin 1535 ~ 1565 nm wavelength range, the light of the phase deviation is less than 5 ° mixer chip.