位置敏感探测器光斑脱靶误差补偿方法研究

Study on Compensation Method of Light Spot Off-target Error of Position Sensitive Detector

摘要:

为了提高位置敏感探测器（PSD）的位置检测范围，解决光斑在探测器光敏面脱靶时无法准确定位光斑的问题，提出一种光斑脱靶误差补偿方法，分析了脱靶前后PSD检测光斑能量重心变化规律，建立了PSD光强信号与位置检测误差间函数关系。实验结果表明：当PSD光敏面尺寸为12mm×12mm时，对于半径为5mm的高斯光斑，通过本文中提出的光斑补偿方案补偿后PSD的X轴检测范围提高了66.7%，位置检测平均相对误差不超过5%，该方法对提高PSD位置检测性能具有重要的意义。

Abstract:

In order to extend the detection range of position sensitive detector, solve the problem that the light spot cannot be accurately positioned when the light spot is off-target on the PSD photosensitive surface, a light spot off-target error compensation method is proposed. The variation law of the spot energy center of PSD detection before and after the off-target was analyzed, and the functional relationship between the PSD light intensity signal and the position detection error was established. The experimental results show that: when the size of the PSD photosensitive surface is 12mm×12mm, the Gaussian light spot with a radius of 5mm is used, and the X-axis detection range of the PSD photosensitive surface is increased by 66.7% after compensation by the spot compensation method proposed in this paper, and the average relative error of position detection is no more than 5%.