基于柔性铰链的光纤光栅三维加速度传感器

Three dimensional acceleration sensor based on flexible hinge fiber Bragg gratings

摘要:

针对振动测量中三维振动信号测量需要,设计了一种基于柔性铰链的光纤光栅三维加速度传感器。建立传感器的振动模型,阐述传感器的结构和工作原理,推导了传感器谐振频率和灵敏度的理论公式。构建了传感单元的数学模型,并用MATLAB对传感器拾振结构关键尺寸参数进行优化设计。加工制作传感器样件,通过振动实验对其进行性能测试。实验结果表明实验结果表明：该传感器在X、Y和Z轴方向的谐振频率分别为673Hz、667Hz和1376Hz,工作频带分别为0~220Hz、0~220Hz和0~450Hz,灵敏度分别为72.3pm/g、70.2pm/g和83.1pm/g。所设计的传感器具有较好的横向抗干扰度,能够满足三维振动信号测量的要求。

Abstract:

Aiming at the need of three-dimensional vibration signal measurement in vibration monitoring, a three-dimensional acceleration sensor of fiber grating based on flexible hinge is designed. The vibration model of the sensor is established, the structure and working principle of the sensor are expounded, and the theoretical formulas of the resonant frequency and sensitivity of the sensor are deduced. The mathematical model of the sensor unit is constructed, and the key dimension parameters of the sensor vibration pickup structure are optimized by MATLAB. The sensor samples were processed and fabricated, and their performance was tested by vibration experiments. The experimental results show that the resonant frequencies of the sensor in the X, Y and Z axis directions are 673Hz, 667Hz and 1376Hz, respectively, the operating frequency bands are 0~220Hz, 0~220Hz and 0~450Hz, and the sensitivity is 72.3pm/ g, 70.2 pm/g and 83.1 pm/g. The designed sensor has good lateral anti-interference degree and can meet the requirements of three-dimensional vibration signal measurement.