四谱段TDICCD图像传感器的设计与制作

Design and Fabrication of Four Spectral TDICCD Image Sensor

摘要:

设计并研制了一种四谱段时间延迟积分电荷耦合器件(TDICCD)图像传感器,器件将四个TDICCD集成在同一芯片上,通过在光窗对应位置上镀不同的窄带滤光膜实现多谱段分光。该TDICCD图像传感器的像元尺寸为28μm×28μm,水平寄存器的有效像元数为3072元,行频为10kHz,电荷转移效率高达0.99999,饱和输出电压为2650mV,抗弥散能力大于等于100倍,动态范围为7143∶1。

Abstract:

A kind of four spectral time-delay-integrated charge coupled device (TDI CCD) is designed and fabricated by integrating four TDICCDs on one chip. Different narrow-band filter films are plated on the corresponding positions of the light window to realize multi-band light splitting. For the designed TDICCD, its pixel size is 28μm×28μm, the horizontal pixel size is 3072 elements, the line frequency is 10kHz, the charge transfer efficiency is 0.99999, the saturation output voltage is 2650mV, the anti-blooming ability is more than 100×, and the dynamic range is 7143∶1.