微通道板表面羟基化工艺研究
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(长春理工大学 物理学院, 长春 130022)

作者简介:

刘菊耀(1997-),女,山西省朔州市人,硕士研究生,研究方向为光电薄膜材料与成像器件;

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O647.2

基金项目:

吉林省科技厅重大科技专项(20200501006GX);吉林省教育厅项目(JJKH20200777KJ).通信作者:王国政E-mail:Wguozheng@163.com


Research on Hydroxylation Process of Microchannel Plate
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(School of Physics, Changchun University of Science and Technology, Changchun 130022, CHN)

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    摘要:

    研究了3种微通道板基底羟基化的方法,测量了羟基化处理后微通道板基底表面水接触角及通道端面的形貌变化,分析了各种方法中微通道板基底的亲水性和腐蚀情况。实验结果表明:氨水双氧水溶液对基体表面的亲水性能提升不大,NaOH溶液对基体有腐蚀作用,经食人鱼溶液处理的基体表面亲水性明显提高且无腐蚀作用。研究了微通道板在食人鱼溶液中的浸泡时间和浸泡温度对表面亲水性的影响。结果表明:随着浸泡温度的增加,微通道板表面水接触角先减小后增大,当温度为80℃时达到极小值,浸泡时间对微通道板表面的亲水性影响不大。最终确定了微通道板表面羟基化工艺:浸泡温度为80℃,静置时间为20~60min。

    Abstract:

    Three methods of hydroxylation of the microchannel plate substrate were studied. The water contact angle of the substrate surface of the microchannel plate after hydroxylation and the morphology change of the channel end surface were measured, and the hydrophilicity and corrosion of the microchannel plate substrate in various methods were analyzed. The experimental results show that the aqueous solution of ammonia and hydrogen peroxide does not greatly improve the hydrophilicity of the substrate surface, the NaOH solution has a corrosive effect on the substrate, and the hydrophilicity of the substrate surface treated with the piranha solution is significantly improved without corrosive effect. The effects of the immersion time and immersion temperature of the microchannel plate in piranha solution on the hydrophilicity of the surface were studied. The results show that with the increase of the immersion temperature, the water contact angle on the surface of the microchannel plate first decreases and then increases, and reaches a minimum value when the temperature is 80℃. The immersion time has little effect on the hydrophilicity of the surface of the microchannel plate. Finally, the surface hydroxylation process of the microchannel plate is determined as the immersion temperature of 80℃, and the standing time of 20~60min.

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引用本文

刘菊耀,王国政,王蓟.微通道板表面羟基化工艺研究[J].半导体光电,2022,43(2):353-357. LIU Juyao, WANG Guozheng, WANG Ji. Research on Hydroxylation Process of Microchannel Plate[J].,2022,43(2):353-357.

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  • 收稿日期:2021-09-28
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  • 在线发布日期: 2022-05-09
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