光谱共焦测量技术综述

Chromatic confocal microscopy measurement technique:a review

摘要:

测量技术正不断向着精密化、智能化、集成化的方向发展,具有代表性的光谱共焦测量技术是在激光共焦显微技术的基础上发展而来,利用色散原理和光谱仪解码分析实现高精度测量。光谱共焦测量技术可进行位移测量、三维重建、表面粗糙度检测和厚度检测,具有无接触、高效率、在线测量等优点,在精密测量中发挥着重要作用,被广泛应用于微电子、工程材料、生物医学和航空航天等领域。近年来,光谱共焦系统在光学系统结构、光学镜头设计、光源优化和数据处理算法等各个方面取得了重大发展。本文在广泛调研的基础上对光谱共焦测量技术进行综述,论述了光谱共焦测量技术相较于其他测量方法的优势,综述了光谱共焦技术的测量原理、发展历程与应用进展,并对光谱共焦测量技术的发展趋势进行展望。

Abstract:

Measurement technology is constantly developing in the direction of precision, intelligence and integration, and one of the most representative methods is chromatic confocal microscopy (CCM). CCM is developed on the basis of laser scanning confocal microscope, using the dispersion principle and spectrometer decoding analysis to achieve high-precision measurement. CCM can perform displacement measurement, 3D reconstruction, surface roughness inspection and thickness inspection, and has the advantages of contactless, high efficiency and online measurement, which are playing an important role in precision measurement and widely used in microelectronics, engineering materials, biomedical and aerospace fields. In recent years, significant developments have been made in various aspects of CCM systems, such as optical system structure, optical lens design, light source optimization and data processing algorithms. This paper reviews the chromatic confocal microscopy based on extensive research, discusses the advantages of CCM compared with other measurement methods, reviews the measurement principle, development history and application progress of chromatic confocal microscopy, and outlooks the development trend of CCM.