体声波谐振式日盲紫外光传感器研究
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(1. 桂林电子科技大学 广西精密导航技术与应用重点实验室, 广西 桂林 541004;2. 中国科学院苏州纳米技术与纳米仿生研究所 纳米加工平台, 江苏 苏州 215123;3. 中国科学技术大学 纳米技术与纳米仿生学院, 合肥 215123;4. 南京理工大学 材料科学与工程学院, 南京 210000)

作者简介:

王笑怡(1996-),女,吉林省双辽市人,硕士研究生,主要研究方向为体声波谐振器件;

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TN23

基金项目:

国家重点研发计划项目(2017YFA0305000).通信作者:林文魁;李海鸥E-mail:wklin2007@sinano.ac.cn


Investigation on Bulk Acoustic Wave Resonant Solar Blind Ultraviolet Sensor
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(1. Guangxi Key Lab. of Precision Navigation Technol. and Application, Guilin University of Electronic Science and Technol., Guilin 541004, CHN;2. Nanofabrication Platform, Suzhou Institute of Nanotechnol. and Nano-Bionics, Chinese Academy of Sciences, Suzhou 215123, CHN;3. School of Nanotechnology and Nano-Bionics, University of Science and Technol. of China, Hefei 215123, CHN;4. School of Materials Science and Engin., Nanjing University of Science and Technol., Nanjing 210000, CHN)

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    摘要:

    提出了一种并联体声波谐振器(BAWR)与Ga2O3基MSM紫外传感器的新型高灵敏度传感器结构,即体声波谐振式日盲紫外光传感器(BAWR-UV Sensor)。设计并制备了MSM Ga2O3紫外传感器和BAWR传感器,将实测的光、暗S参数在仿真软件中封装为S1P数据模型代替MSM等效电路,用MBVD模型代替BAWR等效电路,通过并联两种结构建立了BAWR-UV仿真模型;采用ADS软件仿真了BAWR核心参数对BAWR-UV传感器灵敏度的影响,研究了提高灵敏度的设计方案。仿真结果表明,在0.5~4.5GHz频率范围内,BAWR-UV的并联Q值越大,阻抗灵敏度越高,同时阻抗灵敏度随频率降低而增大,在并联谐振频率fp=0.533GHz时获得最佳阻抗灵敏度为100kΩ/(μW/mm2);频率灵敏度随频率的升高而增大,在fp=4.5GHz时获得最佳频率灵敏度为1.4MHz/(μW/mm2)。最后,开展了高灵敏度日盲紫外传感器的探索。

    Abstract:

    Proposed is a novel high-sensitivity sensor structure with a parallel bulk acoustic wave resonator (BAWR) and Ga2O3-based MSM UV sensor, namely the bulk acoustic wave resonance solar-blind UV sensor (BAWR-UV sensor). The MSM Ga2O3 UV sensor and BAWR sensor were designed and fabricated. The measured light and dark Sparameters were packaged in the simulation software as S1P data model instead of MSM equivalent circuit, MBVD model was used instead of BAWR equivalent circuit, and the two structures were built in parallel to develop the BAWR-UV simulation model. The influence of the BAWR core parameters on the sensitivity of the BAWR-UV sensor was simulated by ADS software, and the design scheme to improve the sensitivity was studied. The simulation results show that in the frequency range of 0.5~4.5GHz, the larger the Qp of BAWR-UV, the higher the impedance sensitivity, and the impedance sensitivity increases with the decrease of frequency, and the optimal impedance sensitivity is 100kΩ/(μW/mm2) when fp=0.533GHz; the frequency sensitivity increases with the increase of frequency, and the best frequency sensitivity is 1.4MHz/(μW/mm2) when fp=4.5GHz. And also the exploration of high-sensitivity solar-blind UV sensors was carried out.

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王笑怡,林文魁,李海鸥,云小凡,曾春红,陈体威,刘义彰,孙玉华,崔奇,张宝顺.体声波谐振式日盲紫外光传感器研究[J].半导体光电,2022,43(2):303-310. WANG Xiaoyi, LIN Wenkui, LI Haiou, YUN Xiaofan, ZENG Chunhong, CHEN Tiwei, LIU Yizhang, SUN Yuhua, CUI Qi, ZHANG Baoshun. Investigation on Bulk Acoustic Wave Resonant Solar Blind Ultraviolet Sensor[J].,2022,43(2):303-310.

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  • 收稿日期:2022-03-26
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  • 在线发布日期: 2022-05-09
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