飞秒激光能量密度对SiC陶瓷微孔加工的影响

Effect of femtosecond laser energy density on drilling of SiC ceramic

摘要:

采用飞秒激光对SiC陶瓷进行螺旋微孔加工实验,研究了能量密度对材料微孔加工形貌及孔形的影响,分析了微孔孔径、圆度及锥度随激光加工工艺参数的变化规律。实验结果表明,相比于微孔出口而言,微孔入口受能量密度的影响较小,更高的能量密度有利于提高微孔的加工质量。该研究获得了孔径＜250 μm、圆度＞0.95、锥度＜1°的近圆柱SiC陶瓷微孔。对加工区域进行检测,发现材料表面存在一定程度的氧化现象,分析了位于不同加工区域元素含量变化的原因。

Abstract:

Helical drilling experiment of SiC ceramic was carried out by femtosecond laser. Effect of energy density on the processing morphology and shape of micro-hole in material was studied. The laws of variation of diameter, circularity and taper of micro-hole with laser machining parameters were analyzed. The experimental results showed that micro-hole at entrance was less affected by energy density in comparison with exit. Higher energy density was conducive to improve the processing quality of micro-hole. Near cylindrical micro-hole of SiC ceramic with diameter < 250 μm, circularity > 0.95 and taper < 1° was obtained in this study. It was found that a certain degree of oxidation existed on the surface of material by detecting the machining zone. Reasons for changes of elemental contents in different processing areas were analyzed.