飞秒激光能量密度对SiC陶瓷微孔加工的影响

Effect of Femtosecond Laser Energy Density on Drilling of SiC Ceramic

摘要:

采用飞秒激光对SiC陶瓷进行螺旋微孔加工实验,研究了能量密度对材料微孔加工形貌及孔形的影响,分析了微孔孔径、圆度及锥度随激光加工工艺参数的变化规律。实验结果表明,相比于微孔出口而言,微孔入口受能量密度的影响较小,更高的能量密度有利于提高微孔的加工质量。该研究获得了孔径小于250μm、圆度大于0.95、锥度小于1°的近圆柱SiC陶瓷微孔。对加工区域进行检测,发现材料表面存在一定程度的氧化现象,分析了位于不同加工区域元素含量变化的原因。

Abstract:

Helical drilling experiments of SiC ceramic were carried out by femtosecond laser. The effects of energy density on the processing morphology and shape of micro-hole in material were studied. The laws of variation of diameter, circularity and taper of micro-hole with laser machining parameters were analyzed. The experimental results show that micro-hole at entrance is less affected by energy density in comparison with that at exit. Higher energy density is conducive to improve the processing quality of micro-hole. Near cylindrical micro-hole of SiC ceramic with the diameter less than 250μm, the circularity more than 0.95 and the taper less than 1° was obtained. It was found that a certain degree of oxidation existed on the surface of material by detecting the machining zone. The reasons for elemental contents change in different processing areas were analyzed.