基于超精密切削的柱面微透镜阵列模具制备工艺研究

Research on Manufacturing Process of Cylindrical Microlens Array Mold Based on Ultra-precision Cutting

摘要:

文章对柱面微透镜阵列纳米压印中用到的精密模具的制作过程开展了仿真分析和实验研究。超精密切削技术是制作精密压印模具的有效手段之一。基于Johnson-Cook本构模型,采用有限元分析方法模拟了超精密切削过程中切削参数与切削力之间的关系,获得了优选的切削参数。实验结果表明,采用优选后的切削参数进行柱面微透镜阵列模具切削能够获得良好的切削效果。切削后模具的面形精度RMS值达到19nm,表面粗糙度S_q达到4nm。

Abstract:

The production process of precision molds used in cylindrical microlens nanoimprint was simulated, and ultra-precision cutting technology is one of the effective means for processing precision imprinting mold. Based on the Johnson-Cook constitutive model, the finite element analysis method was applied to simulate the relationship between the cutting parameters and the cutting force during the ultra-precision cutting process, and the preferred cutting parameters were obtained. Experimental results show that the cylindrical microlens array mold can obtain good cutting effect using the preferred cutting parameters. The surface precision RMS value and the surface roughness S_q of the mold after cutting reaches 19 and 4nm, respectively.