具有绝热结构的高性能锰钴镍氧热敏探测器的制备及特性研究

Fabrication and Characterization of Infrared Bolometer Based on Mn-Co-Ni-O Thin Films with Thermal Isolation Structure

摘要:

通过湿法腐蚀工艺成功制备了具有绝热结构的锰钴镍氧(MCNO)热敏电阻探测器。测试表明,绝热结构使得热敏探测器的热导大幅降低,在真空环境下仅为没有绝热结构器件的1/20,典型热导率值为1.37mW/K。通过V-I测试并结合理论曲线拟合发现,MCNO薄膜材料的热导率随温度增高而减小。绝热结构使得MCNO热敏探测器的响应率大幅提高,在30Hz调制频率、36V偏置电压下,响应率典型值为50.5V/W,是没有绝热结构器件的10倍。实验验证了在MCNO薄膜材料上制作绝热结构热敏探测器的可能性,为制作新型室温全波段高性能红外探测器奠定了基础。

Abstract:

The infrared bolometer based on Mn-Co-Ni-O (MCNO) films with thermal isolation structure is designed and fabricated by wet etching process. Test results indicate that, the thermal conductance of the bolometer with thermal isolation structure is greatly reduced and it is 1.37mW/K under vacuum, which is only 1/20 of that without thermal isolation structure. The V-I measuring experiments and curve fitting prove that the thermal conductance of MCNO increases with the temperature. The bolometer responsivity is significantly enhanced by applying the thermal isolation structure, and the typical value is 50.5V/W at the modulation frequency of 30Hz under the bias of 36V, which is 10 times of that without thermal isolation structure. The feasibility of fabricating bolometer based on MCNO films with thermal isolation structure is demonstrated.