ReSe2薄膜的盐助生长及其光电特性研究

Salt Assisted Growth and Photoelectric Properties of ReSe2 Thin Films

摘要:

二硒化铼(ReSe₂)因具有较好的红外光响应和各向异性特性而成为近年来的研究热点。采用盐辅助化学气相沉积技术,在SiO₂/Si衬底上成功合成了大面积的单层ReSe₂薄膜,其尺寸达到80μm。采用拉曼光谱(Raman)、光致发光光谱(PL)、原子力显微镜(AFM)和X射线光电子能谱(XPS)等手段对制备的ReSe₂薄膜样品进行了形貌、光谱、厚度和元素成分的表征,结果表明所制备的ReSe₂薄膜晶体质量高。基于单层ReSe₂薄膜构筑了场效应晶体管,系统研究了其光电特性,结果显示器件的响应时间达毫秒级。

Abstract:

Recently, rhenium disselenide (ReSe₂) has become a research hotspot due to its good infrared light response and anisotropic properties. Through the salt-assisted chemical vapor deposition technology, large-area monolayer ReSe₂ films with a size of 80 microns were successfully synthesized on SiO₂/Si substrates. The morphology, spectrum, thickness and element composition of ReSe₂ films samples were analyzed by means of Raman spectroscopy (Raman), photoluminescence spectroscopy (PL), atomic force microscopy (AFM) and X-ray photoelectron spectroscopy (XPS), revealing that the as-prepared ReSe₂ films have high crystal quality. Field-effect transistor photodetectors were fabricated based on the monolayer ReSe₂ films and their photoelectric properties were systematically investigated, and the response time of millisecond level is achieved.