Polyvinylidene fluoride (PVDF) was used as the sensing element of the contact force sensor to explore the influence of the properties and thickness of the upper and lower substrate materials on the sensitivity of the sensor.Through the theoretical calculation of piezoelectric equation of piezoelectric material, the relationship between contact force input and voltage output was obtained. The influence of the material properties and thickness of the upper and lower substrates on the sensitivity of the contact force sensor was analyzed by controlling variables. The results of finite element analysis showed that the thickness and elastic modulus of the upper and lower substrate materials has great influence on the sensitivity of the contact force sensor. When 0.025mm PDMS was used as the upper and lower substrate material, the sensitivity of the contact force sensor could reach 0.527mV/n.