二氧化硅平面光波导器件的研究进展

Recent Progresses about Silica-based Planar Lightwave Circuit Devices

摘要:

二氧化硅平面光波导(PLC)器件以其低损耗、高工艺容差,以及与CMOS工艺兼容和与单模光纤模场匹配良好等优点,在光通信、光互连和集成光学中得到了广泛的应用。文章综述了二氧化硅平面光波导器件及其应用的进展,重点针对分束器、阵列波导光栅、可调光衰减器及其集成器件的最新研究进行了介绍,对未来发展趋势进行了展望。

Abstract:

Owing to their advantages such as low loss, high process tolerance, manufacturing process compatible with CMOS processes and good mode field matching with single-mode optical fiber, silica-based planar light-wave circuits (PLC) have been widely used in optical communication, optical interconnections and integrated optics. In this paper, the recent progresses of the silica-based PLC devices and their applications are reviewed. Silica-based PLC devices including beam splitters, array waveguide gratings, variable optical attenuator and their integration devices are described, and future development trends are proposed.