基于PVDF的大面积触力传感器结构优化分析

Structural Optimization Analysis of Large Area Pressure Sensor Based on PVDF

摘要:

以聚偏氟乙烯（PVDF）作为压力传感器的敏感元件，设计一款应用于大面积场所的压力传感器。通过压电材料中压电方程的计算，得到理论上压力输入与电压输出的关系。通过在ANSYS中改变压力传感器的上下衬底及基底材料和厚度，用控制变量法分析不同的材料和厚度对传感器灵敏度的影响。分析结果表明，上下衬底厚度越薄，仿真得到的电压值越接近理论值；上下衬底的弹性模量越小，仿真得到的电压值也越接近理论值，根据实际应用制作可以设计得到上下衬底材料采用PDMS且厚度为0.05mm时，能得到相对最优的PVDF压力传感器。

Abstract:

Polyvinylidene fluoride (PVDF) is used as the sensitive element of pressure sensor, and a pressure sensor used in large area is designed. By calculating the piezoelectric equation of piezoelectric materials, the relationship between pressure input and voltage output is obtained theoretically. By changing the substrate material and substrate thickness of the sensor in ANSYS, the influence of different material and thickness on sensor sensitivity is analyzed by control variable method. The analysis results show that the thinner the thickness of the upper and lower substrate, the closer the simulation voltage value is to the theoretical value; the smaller the elastic modulus of the upper and lower substrate is, the closer the simulation voltage value is to the theoretical value. According to the practical application, we can design the PVDF pressure sensor with PDMS and thickness of 0.05mm.