面向Micro-IMU的MEMS三维可折叠系统的设计与研制

Design and Fabrication of 3D MEMS Foldable System for Micro-IMU

摘要:

提出了一种面向微惯性测量单元(Micro-IMU)应用的微电子机械系统(MEMS)三维可折叠结构,其主要组成部分包括绝缘层上硅(SOI)基底、聚酰亚胺柔性链、金属线以及MEMS多环陀螺仪。文章基于有限元仿真技术,分析了可折叠结构及器件的可行性。基于SOI一体化MEMS技术,将核心传感器的制作工艺与折叠结构工艺相结合,在结构中搭载单轴圆盘多环谐振微陀螺,利用柔性铰链实现结构的三维折叠以及各个传感器之间的电互连,实现单轴惯性传感器的集成,制备出体积为1cm³、质量为250mg的搭载多环谐振微陀螺的三维可折叠系统。

Abstract:

A 3D micro-electromechanical systems (MEMS) foldable structure for Micro-IMU application is proposed, which is composed of SOI substrate, polyimide flexible chain, metal wires and MEMS multi-ring gyroscope. In this paper, the feasibility of foldable structure and sensors is analyzed based on finite element method. Based on SOI integrated MEMS technology, the fabrication process of core sensor and foldable structure technology are integrated. The structure is equipped with a single-axis disk multi-ring MEMS gyroscope, and the flexible hinge is used to realize the 3D folding of the structure and the electrical interconnection between the sensors. A 3D foldable system with a volume of 1cm³ and a mass of 250mg was fabricated.