CO2激光熔融毛细管端面制备的光纤F-P压力传感器

Study on Fabrication of Fiber F-P Pressure Sensor by CO2 Laser Melting Capillary End Face

摘要:

提出了一种利用CO₂激光熔融毛细管端面来制备光纤法布里-珀罗(F-P)压力传感器的方法。F-P结构由普通单模光纤和基于CO₂激光熔融毛细管端面制备的硅薄膜组成。文章详细说明了硅薄膜的制造工艺和熔融参数,并对光纤F-P压力传感器进行了性能测试。实验结果表明:制备的光纤F-P压力传感器对气压具有良好的灵敏度和线性度,灵敏度可达到16.37pm/kPa,线性度为0.998。该光纤F-P压力传感器结构紧凑,易于生产,具有在极端恶劣环境下的应用潜力。

Abstract:

A method for fabricating optical fiber Fabry-Perot (FP) pressure sensor by using CO₂ laser to melt capillary end face is proposed. The F-P structure is composed of ordinary single-mode fiber (SMF) and a silicon film prepared based on the end face of a CO₂ laser fusion capillary. In this paper, the manufacturing process and melting parameters of the silicon thin film are introduced in detail and performance tests are performed on the F-P pressure sensor. The results show that the fabricated fiber F-P sensor realizes good sensitivity and linearity to the pressure, obtaining a sensitivity of 16.37pm/kPa, and the linearity of 0.998.