一种提高大气等离子体加工后表面质量的方法

A method of improving surface roughness after atmospheric plasma processing

摘要:

大气等离子体加工技术是一种针对超光滑表面加工的技术，但是存在加工后光学表面产生沉积的问题。本文通过正交实验验证了通过提高光学表面初始温度和去除深度能够提高加工后光学表面质量，并说明了通过多次加工不仅能够提高光学表面初始温度，而且能够提高去除深度。实验结果说明在确定体积去除率下的多次加工能够改善加工后的表面质量，粗糙度Ra由8.48nm降到2.78nm。

Abstract:

Atmospheric plasma machining is a kind of processing technology aimed to super-smooth surface. But it has the problem that there is the deposition in the optical surface after processing. In this paper, through orthogonal experiments, it is verified that the quality of the optical surface can be improved by increasing the initial temperature and removal depth of the optical surface. It is also shown that the initial temperature of the optical surface can be improved and the removal depth can be improved by multiple processing. The experimental results show that the surface quality can be improved by multiple machining with a certain volume removal rate, and the roughness Ra is reduced from 8.48 nm to 2.78 nm.