石墨烯压力传感器结构设计与压力敏感特性研究

Structural Design and Pressure Sensitivity of Graphene Pressure Sensors

摘要:

以石墨烯作为压力传感器敏感材料,Si为基底材料,氮化硼(PN)为石墨烯保护材料,惠斯通测量电桥作为力电变换测量电路,构建了硅基石墨烯压力传感器。通过鼓泡实验法建立传感器的理论模型,分析了传感器的压力与中心形变位移之间的关系,并结合ANSYS软件静力学非线性分析单元,针对所述石墨烯薄膜的挠度形变特性进行了数值解析与有限元仿真。结果表明,石墨烯薄膜压力与挠度形变的理论分析与仿真结果相吻合,这为石墨烯压力传感器提供了结构设计与理论模型基础。

Abstract:

Taking graphene as the sensitive material of the pressure sensor, Si as the base material, PN as the graphene protection material and Wheatstone bridge as the force-electric transformation measurement circuit, a new structure of silicon-based graphene pressure sensor was constructed. Based on the established theoretical model of the sensor with the foam experimental method, the relationship between the pressure of the sensor and the central change displacement was analyzed. And by combining with the ANSYS software static nonlinear analysis unit, the value analysis and finite element simulation were carried out to analyze the characteristics of deflection deformation of the graphene film. The results show that the theoretical analysis results of graphene film pressure and deflection deformation are consistent with the simulation ones.