IC基板传输机器人末端执行器结构拓扑优化设计

Topology Optimization Design of End-actuator of IC Substrate Transmission Robot

摘要:

在半导体封装基板检测的传输过程中,末端执行器对其快速稳定高效率的传输起着关键作用。在满足设计强度、刚度的条件下,以末端执行器轻量化为目标,建立了末端执行器的三维模型,利用有限元分析软件ANSYS对基板传输机器人末端执行器进行静力学和模态分析,得到末端执行器在最大载荷情况下的应力、应变特性和对应的振型,并对其进行拓扑优化设计,根据拓扑优化结果建立新的末端执行器结构,对新的结构进行强度校核,验证设计方案的有效性。研究结果表明,优化后末端执行器的前四阶固有频率都大于伺服电动机的回转频率(50Hz),质量减少了26.7%,较好地实现了轻量化的目标,同时为后续的相关产品研制提供了一种新的技术方案。

Abstract:

End-actuator is very important for realizing fast, reliable and efficient transmission in substrate detection of semiconductor packaging. Under the condition of satisfying material strength and structure stiffness, a 3D model of the end-actuator was established with the goal to reduce the weight of the end-actuator. The static calculation and modal analysis of the end-actuator of the substrate transfer robot were performed with ANSYS software. Then the stress, strain characteristics and corresponding modes of the end-actuator under the maximum load were obtained. Based on the optimized topology, a new end-actuator structure was established. And the strength of the new structure was checked, verifying the validity of the design scheme. The results demonstrate that the first four order natural frequencies of the end-actuator are much higher than the gyro-frequency of the servomotor and the quality of the new structure is reduced by 26.7%. It achieves the goal of lightweight and provides a new technical solution for the subsequent development of related products.