大口径细光束自准直测量系统误差的实验研究

Error Analysis of Large Aperture and Thin Beam Auto-collimating Measurement System

摘要:

目前的商用自准直仪并不满足纳米光学测量仪(NOM)利用细光束进行测量的要求,大口径细光束模式下的自准直测量系统存在各种误差。为了满足自准直测量系统的高精度要求,根据自准直测量原理,对大口径细光束自准直测量系统中CCD阵面与f-theta透镜焦平面不重合引入的误差进行了归纳分析,并通过相关实验对误差的线性关系进行了验证,结果证明理论计算与实验结果具有良好的一致性。

Abstract:

Commercial autocollimators cannot meet the requirements on measuring thin beam of nanometer optical component measuring machine (NOM), thus various errors exist in large aperture and thin beam auto-collimating system. In order to meet the high-precision requirement of auto-collimating system, based on the principles of auto-collimating, the errors caused by the misalignment between CCD detection surface and f-theta lens focal plane in large aperture and thin beam auto-collimating system were analyzed and experimentally studied. The linear relationship of errors was verified by experiments, and it is indicated that the theoretical calculation has a good consistency with the experimental results.