基于微多环谐振陀螺仪的馈通效应研究

Research on The Feed-through Effect of Micro Multi-ring Resonant Gyroscope

摘要:

由SOI片制备的微多环谐振陀螺仪在测试过程中,不可避免地会引入馈通信号,而目前常用的差分检测馈通取消方式高度依赖微陀螺仪和检测电路的对称性,不能有效地消除馈通信号。针对此问题,提出了一种基于反相信号的馈通取消方案,通过在驱动和检测电极之间施加与馈通信号反相的信号,从而抵消馈通效应带来的干扰,该方法理论上可以在不降低驱动力的情况下将馈通信号完全取消。实验结果表明,该方法能有效消除馈通信号对电容检测的影响,谐振峰高度可提高约25倍。

Abstract:

In the test process of the micro multi-ring resonant gyroscope fabricated with SOI slice, it is inevitable to introduce the feed-through signal. However, the feed-through cancellation method based on differential detection which is current commonly used is highly dependent on the symmetry of the micro gyroscope and the detection circuit, which cannot effectively eliminate the feed-through signal. In order to solve this problem, a feed-through cancellation scheme based on the inverting signal is proposed, which can eliminate the interference caused by feed-through effect by applying the signal which is opposite to the feed-through signal between the driving and the detection electrode. In theory, this method can completely cancel the feed-through signal without reducing the driving force. Experimental results show that this method can effectively eliminate the influence of the feed-through signal on the capacitance detection, and the resonance peak height can be increased by about 25 times.