Abstract:Combining the methods of multi-physics finite element analysis and theoretical calculation, a unit structure of 12μm×12μm microbolometer was designed and simulated by Intellisuite software, including:2D layout of unit structure, process design and 3D accurate modeling of the unit structure. Based on the material parameters of actual MEMS structure, finite element simulations were performed by electrical and thermal-couple multiphysics. The main thermoelectric parameters, response time and response rate of the detection unit were obtained through simulation optimization. And the thermal conductivity of 4.31×10-8W/K, heat capacity 2.69×10-10J/K, voltage response rate of 7200V/W and the thermal response time of 6.24ms were obtained. The proposed micro-bridge design can improve the design efficiency and accuracy effectively, shorten the development cycle, and meet the design requirements of ultra-large-scale small-pixel uncooled infrared focal plane detectors.
