高紫外CCD量子效率的技术研究

Research on A Technique to Enhance the Quantum Efficiency in Ultraviolet Spectral Range of CCDs

摘要:

硅基正照式CCD探测器的紫外谱段响应普遍较低。根据星上系统对CCD器件高量子效率的性能要求，基于减反射膜优化的研究基础，通过对正照式紫外线阵CCD光敏区的结构设计和工艺优化，提升了紫外谱段的相互作用量子效率。经测试评估，紫外线阵CCD器件在300nm~400nm谱段范围内平均量子效率可达46.13%，重点关注的340nm~390nm谱段范围内平均量子效率可达47.48%。研制的紫外线阵CCD探测器满足卫星系统的要求，该卫星已于2018年9月份成功发射，目前在轨工作状态良好。

Abstract:

Front-illuminated Charge-Coupled Devices (CCD) based on silicon substrate always have a lower response in ultraviolet spectral range. An optimized design and processing scheme on the front-illuminated ultraviolet linear CCD, which was applied to enhance the interacting quantum efficiency in ultraviolet spectral range based on optimization of anti-reflecting film to satisfy the needs of satellite system. The measurement indicates that the linear CCD has reached an average quantum efficiency of 45.76% in the spectral range that covers 300nm~400nm. The average quantum efficiency of 47.46% has been achieved in 340nm~390nm range, which is the spectral range that attracts our most attention. The ultraviolet linear CCD products meet all needs of satellite, and the satellite system is running well on its orbit around the earth since it has been already successfully launched in September 2018.