A preheating-reaction method was proposed for the precise control of proton-exchange process of lithium niobate waveguides, and a temperature control model was established. Analysis was performed on the PID control parameter setting and temperature fluctuation error of the proton-exchange temperature control model. The effect of temperature fluctuations during the proton-exchange process on the longitudinal distribution of H+ concentration was investigated. The waveguide sample was fabricated with the preheating-reaction method, and the longitudinal distribution of the refractive index was tested. The results were compared with those of the conventional waveguide samples to verify the effectiveness of the method for proton-exchange control.