In order to assemble a single nanowire to both ends of the microelectrodes successfully, besides dielectrophoretic force, the influence of viscous drag and Brownian force was taken into account to establish the force and motion model of a single nanowire. The trajectory of the nanowire in three-dimensional space was obtained by numerical simulation, and the initial point distribution area which can realize accurate crossing was obtained based on a controllable dielectrophoretic working space model (DWS-DEP). In order to select a suitable electrode shape to assemble asingle nanowire, quasi-stable region of three kinds of electrodes with different tip radians were simulated. The results show that the circular electrodes are easier to realize the cross-assembly of one-dimensional nanostructures. The designed Ti/Au electrode was used to assemble a single nanowire by dielectrophoresis, and the experimental results were in good agreement with the simulation results.
