化学腐蚀法制备的光纤Fabry-Perot位移传感器

Optical Fiber Fabry-Perot Displacement Sensor Based on Chemical Etching Method

摘要:

提出了一种采用化学腐蚀方法制备光纤Fabry-Perot(F-P)位移传感器的方法。采用浓度为40%的氢氟酸溶液腐蚀处理单模光纤端面,通过电弧放电对光纤端面进行熔接,制作光纤F-P传感器,并通过改变传感腔尾纤的粗糙度对其进行优化。实验中,将制备好的F-P腔结构的尾纤端面做未切平和切平处理,得到的条纹对比度分别为16和8dB。分别对两种情况的光纤F-P传感器的位移特性进行了实验和分析,结果表明:采用化学腐蚀法制作的光纤F-P传感器对位移具有良好的灵敏度和线性拟合优度,尾纤端未切平的F-P的线性拟合优度更好,测量精确度更高,灵敏度可达到0.010 0nm/μm,线性拟合优度为0.999 3。

Abstract:

A method for the fabrication of optical fiber Fabry-Perot (F-P) sensor was proposed based on chemical etching. F-P sensors were demonstrated by corroding the single-mode fiber end with 40% hydrofluoric acid and splicing it with arc discharge. Then the performance was optimized by changing the roughness of sensing cavity pigtail. The fringe contrast of 16 and 8dB were obtained on the pigtail fiber end delt with flat cutting or not. Experimental result indicate that the fabricated F-P sensors own good sensitivity and linearity, reaching 0.0100nm/μm and 0.9993, respectively.