The ZnO nanorod arrays were fabricated on the substrates with seed layers after annealing at different temperatures by hydrothermal method. Effects of annealing temperature of seed layers on the morphology, structure and luminescence properties of ZnO nanorod arrays were investigated. The results reveal that the size and density of ZnO nanorods can be controlled by modulating the annealing temperature of seed layers. In addition, ZnO nanorod arrays grown on the seed layer annealed at 400℃ show the best morphology and excellent luminescence property.
