a-SiCdTe∶H薄膜做液晶光阀光敏层的光学特性研究

Optical Properties of a-SiCdTe∶H Films as Photosensitive Layer of The Liquid Crystal Light Valve

摘要:

采用射频磁控溅射法制备了用于液晶光阀光敏层的a-Si1-x(CdTe)x∶H薄膜。研究了CdTe含量对氢化非晶硅薄膜光学性能的影响。采用扫描电镜(SEM)、X光电子能谱(XPS)、椭偏仪等测试手段对薄膜的表面形貌、成分和光学性能进行了表征。结果表明，薄膜的折射率和吸收系数均随x值的增大而增大；而光学带隙Eopt随x值的增大从2.01eV降到1.75eV。薄膜在可见光范围内透过率随着x值的增大而有所降低，且吸收边发生红移。

Abstract:

a-Si1-x(CdTe)x∶H films were prepared by RF magnetron sputtering as the photosensitive layer of the liquid crystal light valve. The influence of CdTe content in the thin films on optical properties was studied. The surface topography, composition, optical properties of the films were investigated by Scanning electron microscopy (SEM), X ray photoelectron spectroscopy (XPS), ellipsometry and other testing methods. The results show that both the refractive index and the absorption coefficient of the film increase with the value of x increasing; while the optical band gap decreases from 2.01eV to 1.75eV. Film transmittance in the visible range decreases and the the absorption edge shifts to red.