一种CCD静电保护电路的设计

Design of an ESD Protection Circuit for CCDs

摘要:

介绍了一种适用于电荷耦合器件(CCD)的静电保护电路.在对该静电保护电路工作原理分析的基础上,通过电路仿真确定了静电保护电路中MOS管的电学参数,再由半导体器件仿真确定了其工艺条件,并按此条件制作了静电保护电路.通过人体模型静电放电试验对该静电保护电路进行测试,结果表明CCD的抗静电能力由原来的不足100V提高到450V.

Abstract:

Based on analyzing the operating principles of the designed ESD (Electro-Static Discharge) protection circuit,the electric parameters of the MOS in the circuit were defined by simulation,and the process conditions were simulated by TCAD tools.Experiments are performed to test the performance of the ESD protection circuit by Human Body Model.The results indicate that the failure voltage of CCD for ESD increases from less than 100V to 450V after applying the ESD protection circuit.The test results show that this ESD protection circuit is useful for improving the antistatic ability of CCD and the reliability of the devices in practical applications.